JPH0449151Y2 - - Google Patents
Info
- Publication number
- JPH0449151Y2 JPH0449151Y2 JP2413087U JP2413087U JPH0449151Y2 JP H0449151 Y2 JPH0449151 Y2 JP H0449151Y2 JP 2413087 U JP2413087 U JP 2413087U JP 2413087 U JP2413087 U JP 2413087U JP H0449151 Y2 JPH0449151 Y2 JP H0449151Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction tube
- tube
- reaction
- introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 61
- 239000011521 glass Substances 0.000 claims description 11
- 239000012495 reaction gas Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 description 12
- 239000013307 optical fiber Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2413087U JPH0449151Y2 (en]) | 1987-02-23 | 1987-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2413087U JPH0449151Y2 (en]) | 1987-02-23 | 1987-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63135939U JPS63135939U (en]) | 1988-09-07 |
| JPH0449151Y2 true JPH0449151Y2 (en]) | 1992-11-19 |
Family
ID=30823081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2413087U Expired JPH0449151Y2 (en]) | 1987-02-23 | 1987-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449151Y2 (en]) |
-
1987
- 1987-02-23 JP JP2413087U patent/JPH0449151Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63135939U (en]) | 1988-09-07 |
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